Fundamentals of Microfabrication and Nanotechnology
CHEMI
$262.47
Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics.
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